FACILITIES

Materials and Device Preparation

Thin Film Synthesis

• Chemical Solution Deposition

            - Inert Atmosphere Glove Box

            - Schlenk Line

            - Spin Coaters

            - Thermal facilities ( Tube furnace, etc.) for Crystallization

• Sputter Deposition (Discovery 18 access)

Bulk Material Preparation

• Powder Processing

            - Ball and Attrition Mills

• Thick Layers

            - Tape Casters

• Discs

            - Uniaxial Press, Wafering Saw, Polisher

Electrical Characterization

• Dielectric

            - Various LCR bridges and Impedance Analyzers

            - Environmental Chamber

            - Leakage Current Measurement

• Ferroelectric

            - Radiant Technologies RT6000HVTS

• Piezoelectric

            - Berlincourt Meter

            - Fiber Optic Displacement Probe

            - Various LVDTs

            - Electrometer

• Conductors

            - Van der Pauw (four point probe)

            - Hall Effect